Wafer Washers: Ultra T SWC111M

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Ultra T SWC111M Specifications

Features

  • High-pressure pump
  • CO2 Reionizer
  • Controllable wash and dry spin speeds
  • Controllable wash and dry times
  • Set up for 8 inch wafer and frame
  • Emergency OFF button
  • Small foot print

Facilities Requirements

  • Water: 0.5GPM @ 30 to 50 PSI
  • Air: 7 CFM @ 80PSI
  • N2: 1 CFM @ 60 PSI
  • Power: 5 Amps @ 115VAC