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• All Wafer Washers
• DCS140
• Micro Automation 2066
• Ultra T SWC111
• Ultra T SWC111M

Ultra T SWC111M Specifications

Features

• High-pressure pump
• CO2 Reionizer
• Controllable wash and dry spin speeds
• Controllable wash and dry times
• Set up for 8 inch wafer and frame
• Emergency OFF button
• Small foot print

Facilities Requirements

• Water: 0.5GPM @ 30 to 50 PSI
• Air: 7 CFM @ 80PSI
• N2: 1 CFM @ 60 PSI
• Power: 5 Amps @ 115VAC